Onto Innovation (ONTO) Proxy filing summary

Executive summary

• Annual meeting scheduled for May 20, 2026, at company headquarters in Wilmington, MA.

• Shareholders are invited to vote on key proposals, including director elections, executive compensation, and auditor ratification.

Voting matters and shareholder proposals

• Election of seven directors is proposed, with all nominees recommended by the board.

• Advisory vote on executive compensation for named executive officers is included.

• Ratification of Ernst & Young LLP as independent auditor for fiscal year ending December 31, 2026.

• Other business may be addressed as appropriate during the meeting.

Board of directors and corporate governance

• Board recommends all director nominees for election.

• Nominees include Stephen D. Kelley, Susan D. Lynch, David B. Miller, Michael P. Plisinski, Stephen S. Schwartz, Christopher A. Seams, and May Su.